High-resolution Micropatterning of Off-stochiometric Thiol-enes (oste) via a Novel Lithography Mechanism

نویسندگان

  • J. Mikael Karlsson
  • Carl Fredrik Carlborg
  • Farizah Saharil
  • Fredrik Forsberg
  • Frank Niklaus
  • Wouter van der Wijngaart
  • Tommy Haraldsson
چکیده

We present an entirely novel, self-limiting photolithography mechanism in off-stoichiometry thiol-ene (OSTE) polymers enabling high-resolution and high-aspect ratio features. The OSTE polymers have previously been shown to be promising materials for fabrication of microfluidic devices with tailored surface modifications and mechanical properties. We here introduce direct lithography for micropatterning of OSTE as an alternative to mechanical machining or casting, resulting in a simple and reliable fabrication method of self-bonding photopatterned multilayer microfluidic devices.

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تاریخ انتشار 2012